Optical Process Monitor - Optius | Optical Process Monitor

Features

•	Broad Measurement Wavelength Measurement wavelength range is 200 to 1000nm, it is also possible to measure simultaneously specified multiple wavelengths.

•	Simultaneous Measurement of up to 5 channels Addition of the Expansion unit (ESC) options enable simultaneous measurement of up to 5 channels.

• Feedback Control
Feedback control of external equipment by measurement result.
• Exclusive Software
Exclusive software corresponding to multiple processes including the reactive sputtering and etching is included.
• Two Kinds of Light Receiving Units
Receiver unit can be selected from atmosphere type or vacuum type depending on the application.

Applications

• Feedback control of MFC and process monitoring in reactive sputtering.
• Endpoint detection by the plasma etching process.
• Confirmation of the cleaning and initialization status of Etching and CVD equipments.

Specifications

Model		Optius
Number of measurement channel	1 Channel	Main unit (TSC)
Number of measurement channel	5 Channels	Maximum. Add an expansion unit options (ESC)
Wavelength range		200 to 1000 nm
Optical resolution 1		1.7 nm (FWHM)
Integration time		1 to 1000 ms
PID control cycle time		100 to 1000 ms
Number of measurement wave length 2		10
Number of wavelengths that PID control is possible 2		1
Number of wavelength operation processing 2		10
Number of discriminant processing 2		10
Analog input	Channel	3ch (Per measurement ch), Max 15ch (At 5ch measurement)
	Signal	Massflow Rate, Power surplly voltage, Pressure level
	Voltage	0 to 5 V or 10 V
Analog output	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
	Signal	Massflow control, Wave length strength, Calculation result
	Voltage	0 to 5 V or 10 V
Disital input	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
Disital input	Signal	START, STOP, ABORT
Disital output	Channel	4ch (Per measurement ch), Max 20ch (At 5ch measurement)
Disital output	Signal	Valve close, Set point, Pressure alarm, Error
Connection with PC 3		LAN (1000BASE-T/100BASE-TX)
Dimensions	W x D x H	Main unit (TSC) : 250 x 300 x 121 mm
Dimensions	W x D x H	Expansion unit (ESC) : 50 x 300 x 121 mm
Weight		Main unit (TSC) : 4.9 kg
Weight		Expansion unit (ESC) : 1.3 kg
Power		AC100 to 240 V (50/60 Hz)
Consumed power		60W (5ch)
Operating environment		Temperature : 10 to 40°C
Operating environment		Humidity : 15 to 80% RH (Non condensing)
Model		Optius

1 This value is a reference.

2 Number of the simultaneous measurement processing per measurement ch.

3 PC is not included. For the specifications of PC, please refer to the standard specifications.