Compact Process Gas Monitor - Qulee CGM Series | Process Gas Monitor

ULVAC Compact Process Gas Monitor - Qulee CGM Series

Qulee is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.

The Qulee offers high accuracy and resolution even at high pressure (1 Pa or less).

Features

• Ideal for Sputtering System
Ideal for process monitoring of various sputtering system.
• Differential Pumping System not Required
No differential pumping system required at 1 Pa (7.5×10^-3 Torr / 1×10^-2 mbar) lower.
• Integrated Display
No need for a PC.
• Simple Operation
"One-Click" function.
• Bake Out
Max 120°C (248°F) high temperature bake (250°C (482°F) when sensors are removed).
• Degas Function
Electron bombard degas.

•	Protection and Maintenance Features Ion source and secondary electron multiplier protection maintenance help function. Traceability of analysis tube (patent pending).

• Various Leak Tests are Available
Helium leak test, air leak test, built-up test
• Total Pressure Measurement
Capable of total pressure measurement (ionization gauge).
• Qulee QCS is Included
This software is included and compatible with Windows 7/8.
• QIP (Quick Install Package system) is Included
Auto measuring package (refer to options catalog for details).
• Applicable Standard
Conforms with CE.

Applications

• Process monitoring for PV, FPD, and semiconductor system.
• Residual gas analysis in PVD system.
• Impurities (H₂O, etc.) control in PVD system.
• For leak testing.

Specifications

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