Quadrupole Mass Spectrometer | Process Gas Monitor | ULVAC Singapore

ULVAC Products Process Gas Monitor Quadrupole Mass Spectrometer - Qulee with YTP

Quadrupole Mass Spectrometer with Differential Pumping Kit -
Qulee with YTP

ULVAC Quadrupole Mass Spectrometer

A variation of Qulee, adding new features in response to customer needs. By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.

FEATURES
APPLICATIONS

Features

• Excellent Cost Performance
Provides gas analysis with an optional differential pumping unit.
• Compact Design
Utilizes standard vacuum unit model YTP-50M.
• Integrated Display Unit Design
Provides visual data without need for a PC.
• Easy to Operate
One-click function for easy operation, no complex procedures.

•	Atmospheric Pressure Analysis Selectable maximum measurable pressures 3,000 Pa, 500 Pa, 100 Pa, 10 Pa and 1 Pa (22.5 Torr, 3.75 Torr, 0.75 Torr, 7.5x10^-2 Torr and 7.5x10^-3 Torr / 30 mbar, 5 mbar, 1 mbar, 0.1 mbar, and 1.0x10^-2 mbar).

• Select a Model Depending on your Application
Select from the mass numbers 1 to 100 (BGM-101/102), 1 to 200 (BGM-201/202), 1 to 300 (HGM-302).
• Complete Leak Test Function
Helium leak test, air leak test, leak up test.
• Qulee QCS is Included
This software is included and compatible with Windows 7/8.

Applications

• Various types of gas analysis for research and development.
• Gas monitoring of PVD system during processing.
• Residual gas analysis in PVD system.
• Residual gas analysis for high vacuum pumping equipment, etc.
• Atmospheric pressure (10⁵ Pa, 760 Torr, 1,013 mbar) of gas analysis (Atmospheric pressure type).
• Analysis of endpoint monitoring at vacuum furnace process and oxygen density.

Specifications

Model

Model

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4 .

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