Extremely High Vacuum Gauge - AxTRAN | Vacuum Gauge

ULVAC Extremely High Vacuum Gauge - AxTRAN

AxTRAN is a hot cathode type ionization vacuum gauge with a Bessel Box type energy filter installed between the ion source and the ion collector. This design provides a measurement resolution of 0.5×10^-10Pa by reducing the residual current due to soft X-rays and Electron Stimulated Desorption (ESD) ions.

Features

• Measures ultra high vacuum to extreme high vacuum.
• Bessel Box type energy filter:
Reduce soft x-ray and residual current such as ESD ion.
• Measures a wide pressure range (1x10^-2 to 0.5x10^-10 Pa).
• Pressure is 0 to 10V Log output (psudo-log output) / 1V linear output within each digit.
• 2 set points output.
• Digital output(BCD) and serial communication(RS232C) : (option).

Applications

• For total pressure measurement of vacuum equipment such as a high-energy accelerators.
• For pressure measurement of ultra high or extreme high vacuum equipment used in UHV or XHV research work.
• Conforms with CE.

Specifications

Model		CR16A	CR30A	CR60A	CR300A
Max. pumping speed	m³/h	16	30	55	300
	L/min	280	500	920	5000
	CFM	9.8	17.6	32.4	176
Ultimate pressure 1	Pa	≤3.0			≤0.5
	Torr	≤2.0E-2			≤4.0E-3
	mbar	≤3.0E-2			≤5.0E-3
Max. inlet pressure		Atmospheric pressure
Max. outlet pressure		Atmospheric pressure
Power 2	(Phase) Voltage	(1) 100V (1) 200V (3) 200V	(1) 100V (1) 200V (3) 200V	(1) 200V (3) 200V	(1) 200V (3) 200V
Motor rating	kW	0.72	0.72	1.5	3.0
Inlet port		NW25	NW25	NW40	NW50
Outlet port		NW25	NW25	NW40	NW40
Weight	kg	35	35	48	100
Cooling method		Air cooling
Gas ballast mechanism 3		Equipped
Max. water vapor tolerance 4	g/h	<300	<300	<500	<500
Standard accessory		Air filter
Model		CR16A	CR30A	CR60A	CR300A

1 Ultimate pressure is a value without gas ballast gas.

2 Please specify phase and voltage when ordering.

3 The valve for gas ballasts is an option.

4 Maximum water vapor tolerance is a value when gas ballast is used. Make sure to use a gas ballast mechanism.