G-TRAN Series - Pirani Gauge Sensor Unit - SP1 | Pirani Gauge | Vacuum Gauge

Features

•	Transducer specifications: When the pressure display is not required, the following advantages can be achieved: - Vacuum gauge cost is reduced because the display has been eliminated. - Smaller size frees-up control panel space. - Wiring is reduced.

• Replacing sensort heads is greatly simplyfied.
• Corrosion-resistant platinum is used for the filament material.
• You can use current sensor heads without modification. (SP1: WP-01, 02, 03, 16).
• Able to output 2 set points.
• SP1: Pressure reading is a 0 to 5V output　(non-linear).
• Able to operate at 24VDC power input.

Applications

• Process control in the low vacuum range of vacuum equipment such as for semiconductor, optics and electronic parts manufacturing systems.
• Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.

•	Process control in the low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment.

Specifications

Model		CR16A	CR30A	CR60A	CR300A
Max. pumping speed	m³/h	16	30	55	300
	L/min	280	500	920	5000
	CFM	9.8	17.6	32.4	176
Ultimate pressure 1	Pa	≤3.0			≤0.5
	Torr	≤2.0E-2			≤4.0E-3
	mbar	≤3.0E-2			≤5.0E-3
Max. inlet pressure		Atmospheric pressure
Max. outlet pressure		Atmospheric pressure
Power 2	(Phase) Voltage	(1) 100V (1) 200V (3) 200V	(1) 100V (1) 200V (3) 200V	(1) 200V (3) 200V	(1) 200V (3) 200V
Motor rating	kW	0.72	0.72	1.5	3.0
Inlet port		NW25	NW25	NW40	NW50
Outlet port		NW25	NW25	NW40	NW40
Weight	kg	35	35	48	100
Cooling method		Air cooling
Gas ballast mechanism 3		Equipped
Max. water vapor tolerance 4	g/h	<300	<300	<500	<500
Standard accessory		Air filter
Model		CR16A	CR30A	CR60A	CR300A

1 Ultimate pressure is a value without gas ballast gas.

2 Please specify phase and voltage when ordering.

3 The valve for gas ballasts is an option.

4 Maximum water vapor tolerance is a value when gas ballast is used. Make sure to use a gas ballast mechanism.