Cryopump -
4K Cryocoolers - UR4K03

ULVAC Cryopump - 4K Cryocoolers - UR4K03

For decades, ULVAC has manufactured cryopump systems for semiconductor, LCD and related vacuum industries. The experience in these competitive markets has taught us to build highly reliable and powerful 2-stage Gifford-McMahon refrigerators.

As demands for 4K or pulse-tube cryocoolers increase, we believe our cryocoolers, backed by our proven vacuum and cryogenic technologies, will meet the expectations in the leading-edge industries or R&D fields.