Power Saving Accessory for Dry Pumps - ECO-SHOCK ES10 | Dry Pump | Vacuum Pump

Features

•

ECO-SHOCK Contributes to Energy Savings
Maximum 80% reduction of power consumption of dry pump. 1
Effective in suppressing heat generation of dry pump resulting in reduction of air conditioning costs. ECO-SHOCK runs with only 65 Watts of power and without N2 and cooling water.
NOTE Unusable when pumping flammable and toxic corrosives gases.

•	Effective when used with capacity transfer type of Dry Pump Excellent results when used with a multi-stage root type. 2 Very effective when dry pump runs lower than 1000Pa.

•	Overall Dry Pump Performance is Improved Improves ultimate pressure performance and reduction in exhaust gas noise. No reduction in pumping speed in all pressure range.

• User-Friendly
Easy installation by attaching a valve unit to the exhaust pipe. 3

1 A power consumption reduction rate changes depending on mump model, gas volume, etc.

2 ECO-SHOCK could not be used with certain claw root, screw type or shaft seal pumps, etc. Contact ULVAC for details.

3 Modification could be required prior to installation of the ECO-SHOCK. Contact your nearest ULVAC service center for installation.

Applications

• Power saving for dry pumps used as fore pumps for turbo molecular pump on sputtering and evaporation system.
• Power saving for dry pumps used for load lock chambers.
• Power saving for dry pumps used for vacuum laminator, vacuum packing, evacuating inert gases such as air, nitrogen or argon, etc.

Specifications

Model		ES10
Power	Supply	100V~220VAC \| 50/60 Hz \| 1phase (automatic change)
Power	Consumption	65W (Reading when pressure is at ultimate puressure and gas for shaft seal and gas ballast are 0 Pa·m³/s)
Control System	Input	Remote start / stop (24VDC contact with voltage). Contact capacity : Non-voltage contact with contact capacity of 2.0A minimum is required.
	Output	Overcurrent alarm output (non-voltage contact) Contact capacity : 24VDC, 1.0A
	Operation	Manual start switch
	Display	Display of operation time
Dimensions	Basic unit	175mm x 310mm x 240mm
Dimensions	Valve unit	Ø66mm x 110mm (NW40)
Weight	Basic unit	8.3kg
Weight	Valve unit	800g
Connection	Port size	G1/4" (INLET, OUTLET) The connector has been installed.
Connection	Recomm. piping	Ø6.53mm minimum \| Length : 3m maximum
Model		ES10

Effects

ULVAC Pump Model		LR60	LR90	LR180
Pumping Speed 1	L/min	1333	2100	3950
Pumping Speed 1	CFM	47	74	139
Measured power consumption 2	kW	2.1	3.6	6.6
Measured power consumption with ECO-SHOCK attached 2 3 4	kW	0.7	1.0	1.6
Power reduction		67%	72%	76%

1 At 60Hz power.

2 Power consumption at ultimate pressure.

3 Including power consumption of ECO-SHOCK.

4 Reading at ultimate pressure, with shaft seal and gas ballast at 0 Pa·m³/s. These valves change slightly depending on the gas flow at ballast and shaft seal.