ECO-SHOCK Contributes to Energy Savings
Maximum 80% reduction of power consumption of dry pump. 1
Effective in suppressing heat generation of dry pump resulting in reduction of air conditioning costs. ECO-SHOCK runs with only 65 Watts of power and without N2 and cooling water. NOTE Unusable when pumping flammable and toxic corrosives gases.
•
Effective when used with capacity transfer type of Dry Pump
Excellent results when used with a multi-stage root type. 2
Very effective when dry pump runs lower than 1000Pa.
•
Overall Dry Pump Performance is Improved
Improves ultimate pressure performance and reduction in exhaust gas noise. No reduction in pumping speed in all pressure range.
•
User-Friendly
Easy installation by attaching a valve unit to the exhaust pipe. 3
1 A power consumption reduction rate changes depending on mump model, gas volume, etc.
2 ECO-SHOCK could not be used with certain claw root, screw type or shaft seal pumps, etc. Contact ULVAC for details.
3 Modification could be required prior to installation of the ECO-SHOCK. Contact your nearest ULVAC service center for installation.
Applications
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Power saving for dry pumps used as fore pumps for turbo molecular pump on sputtering and evaporation system.
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Power saving for dry pumps used for load lock chambers.
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Power saving for dry pumps used for vacuum laminator, vacuum packing, evacuating inert gases such as air, nitrogen or argon, etc.
G1/4" (INLET, OUTLET) The connector has been installed.
Recomm. piping
Ø6.53mm minimum | Length : 3m maximum
Model
ES10
Effects
ULVAC Pump Model
LR60
LR90
LR180
Pumping Speed1
L/min
1333
2100
3950
CFM
47
74
139
Measured power consumption2
kW
2.1
3.6
6.6
Measured power consumption with ECO-SHOCK attached234
kW
0.7
1.0
1.6
Power reduction
67%
72%
76%
1 At 60Hz power.
2 Power consumption at ultimate pressure.
3 Including power consumption of ECO-SHOCK.
4 Reading at ultimate pressure, with shaft seal and gas ballast at 0 Pa·m³/s. These valves change slightly depending on the gas flow at ballast and shaft seal.