Process Gas Monitor
Qulee (pronounced as KLEE) is ULVAC's latest model for residual gas analysis and monitoring. The ULVAC Qulee achieves highly accurate measurements with high resolution even at a high pressure (1 Pa) order the simple (easy) to use Qulee today.
| Compact Process Gas Monitor - Qulee CGM Series |
| Basic Process Gas Monitor - Qulee BGM Series |
| High Performance Process Gas Monitor - Qulee HGM Series |
| Reactive Gas Process Monitoring System - Qulee RGM-202 / RGM-302 |
| Quadrupole Mass Spectrometer with Differential Pumping Kit - Qulee with YTP |
| Software for Gas Analysis - Qulee QCS Series |
Residual Gas Analysis / Process Gas Monitor
Compact Process Gas Monitor -
Qulee CGM Series
Qulee is ULVAC's latest model for residual gas analysis and gas monitoring during process. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
The Qulee offers high accuracy and resolution even at high pressure (1 Pa or less).
Residual Gas Analysis / Process Gas Monitor
Basic Process Gas Monitor -
Qulee BGM Series
Qulee is ULVAC's latest model for residual gas analysis. Feedback from facility engineers in various production lines are incorporated in the new product design offering utmost simplicity.
Most appropriate for system control of vacuum evaporator and various types of vacuum furnaces.
Residual Gas Analysis / Process Gas Monitor
High Performance Process Gas Monitor -
Qulee HGM Series
ULVAC's Qulee HGM residual gas analyzer series with revolutionary simplicity of use.
Offers highest sensitivity for all models at 2.5×10-6 A/Pa, Qulee HGM can meet the needs of various R&D and other vacuum system process monitoring.
Reactive Gas Process Monitoring System -
Qulee RGM-202 / RGM-302
This process monitoring system has been developed for various kinds of applications such as etch, CVD and other reactive gas processes. Using ULVAC's original ion source and pumping system enables you to achieve stable measurements results.
Quadrupole Mass Spectrometer with Differential Pumping Kit -
Qulee with YTP
A variation of Qulee, adding new features in response to customer needs. By adding a differential pumping unit, the Qulee provides measurement and analysis capabilities for process management and residual gas analysis.
Software for Gas Analysis -
Qulee QCS Series
Qulee QCS is a software package for gas analyzers and process monitors manufactured by ULVAC. This is suitable for all Quadrupole gas spectrometers made by ULVAC. Older software can be upgraded to this QCS version. Data acquisition and saving data is carried out by simple key strokes.