Mechanical Booster Pump


Mechanical booster pumps are used with other roughing vaccum pumps, such as oil rotary pumps, dry vacuum pumps, and water sealed pumps. As the name implies, they are used to "boost" the pumping speed of the roughing pumps within their normal vaccum range.









ULVAC Mechanical Booster Pump - PMB Series Ver.D

Mechanical Booster Pump -
PMB Series Ver.D

The PMB series Ver.D is a wide use mechanical booster pump with multiple voltage motor (high efficiency). It is possible to run with air-cooled depending on use condition. And surface treatment and atmospheric operation type are selectable as option.








ULVAC Mechanical Booster Pump - PRC Series

Mechanical Booster Pump -
PRC Series

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10 kPa to 0.1 Pa, where roughing pump pumping speed drops.

The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.








ULVAC Mechanical Booster Pump - PMB-C

Mechanical Booster Pump -
PMB-C

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10 kPa to 0.1 Pa, where roughing pump pumping speed drops.