Equipment
Semiconductor and Electronic Device Production Equipment
Even higher integration and functionality and lower cost are required for next-generation semiconductors and high-function devices. ULVAC develops super miniaturization technologies for such semiconductors and electronic devices and releases one new technology or product after another to support the evolution of society.
Industrial Equipment
ULVAC has a long history of providing vacuum equipment for general industries; in fact, this is one of its traditional areas of business which it has been working on since the 1950s when vacuum technologies were still in their infancy.
Today, ULVAC is providing a colorful spectrum of solutions to a wide range of industries and ‚elds, such as automobiles, pharmaceuticals and food products, by taking advantage of the basic technologies it has developed over the years.
Sputtering System
CVD System
Vacuum Evaporation System
Vapor Deposition Polymerization System
Ashing System
Etching System
Ion Implantation System
Vacuum Furnace
Roll Coater
Freeze Drying / Vacuum Drying System
Vacuum Distillation System
Automatic Leak Tester
Others
Components
One of the key areas of focus of ULVAC as a comprehensive vacuum manufacturer is the development of components. We are working to supply a wide range and variety of components, ranging from vacuum pumps, measurement instruments, and analyzers to components that form various power generators for deposition equipment and vacuum valves, while at the same time pursuing the latest vacuum technologies.
Vacuum Pump
Vacuum Pump Oil and Grease
Vacuum Gauge
Process Gas Monitor
Optical Process Monitor
Helium Leak Detector
Materials
ULVAC supplies electronic materials, such as sputtering targets, to a wide variety of industries. It also provides technologies for the integrated manufacturing and precision machining of materials such as titanium, tantalum, zirconium, and niobium in the eld of high-performance materials
Sputtering Targets
High Performance Materials
Nano-metal Ink